Electron-Beam Lithography & Process Engineer

Staff - Non Union

Job Category

M&P - AAPS

Job Profile

AAPS Salaried - Scientific Eng., Level C

Job Title

Electron-Beam Lithography & Process Engineer

Department

Technical Operations | Quantum Matter Institute | Faculty of Science

Compensation Range

$7,283.75 - $10,474.08 CAD Monthly

The Compensation Range is the span between the minimum and maximum base salary for a position. The midpoint of the range is approximately halfway between the minimum and the maximum and represents an employee that possesses full job knowledge, qualifications and experience for the position. In the normal course, employees will be hired, transferred or promoted between the minimum and midpoint of the salary range for a job.

Posting End Date

July 19, 2026

Note: Applications will be accepted until 11:59 PM on the Posting End Date.

Job End Date

March 31, 2028

At UBC, we believe that attracting and sustaining a diverse workforce is key to the successful pursuit of excellence in research, innovation, and learning for all faculty, staff and students. Our commitment to employment equity helps achieve inclusion and fairness, brings rich diversity to UBC as a workplace, and creates the necessary conditions for a rewarding career.

Job Description Summary

The Stewart Blusson Quantum Matter Institute at UBC (Blusson QMI) is a world-leading venture advancing research into solid-state systems and phenomena that explicitly involve quantum mechanics. Core areas of expertise include the development of materials and methods of fashioning them into functional devices that display remarkable new paradigms of operation.

Blusson QMI has invested heavily in a state-of-the-art JEOL JBX-8100FS 100 kV vector-scan electron-beam lithography tool to enable device fabrication at the nanoscale where quantum properties manifest. The Electron-Beam Lithography & Process Engineer is the dedicated senior expert and single point of accountability for this tool across all operational, technical, and client-facing dimensions. The role owns the full exploitation of the JBX-8100FS as a revenue-generating asset that supports Blusson QMI’s primary mission of academic research by delivering consistent, reliable, high-resolution patterning services to both internal academic researchers and external industrial partners under NDA-protected, fee-for-service-driven contracts.

While the primary responsibility is ensuring optimal functioning of the JEOL JBX-8100FS (including user/client training, scheduling, and service delivery), the Engineer will be encouraged to actively contribute technical expertise to ongoing academic research projects when strategic opportunities arise, thereby supporting the Institute’s core mission of advancing quantum-matter science.

The Engineer plans, designs, and delivers complete micro- and nano-fabrication engineering solutions for multiple concurrent projects, working independently with a proactive and creative spirit while collaborating closely with colleagues. A core part of the mandate is to advance Blusson QMI’s industry-service business model by translating partner-company requirements into manufacturable, yield-critical device processes and interacting directly with stakeholders at the highest technical and executive levels (C-level, VP, and principal engineers).

The post holder has a duty to ensure that all tasks conducted within Blusson QMI labs are performed in a safe manner that conforms to current legislation and workplace protocols.

The role will also support Blusson QMI’s strategic shift toward a sustainable industry-service model. The Engineer will actively support the growth of commercial partnerships by translating company device requirements into high-value nanofabrication deliverables, contributing directly to the Facility’s reputation as a preferred partner for quantum, photonics, semiconductor, and advanced-materials companies.

Organizational Status

The Electron-Beam Lithography & Process Engineer reports to the Blusson QMI Facilities Director. The post holder will work independently and proactively, making frequent use of Blusson QMI cleanroom facilities and collaborating closely with other facility staff to deliver industry-standard results.

Work Performed

The Electron-Beam Lithography & Process Engineer will support multiple concurrent commercial and academic research projects end-to-end, owning the micro- and nano-fabrication aspects from initial device specification through to functional, yield-critical deliverables. This senior role requires ownership of Blusson QMI’s JEOL JBX-8100FS (100 kV vector-scan system) as a revenue-generating, client-facing asset that serves both internal academic researchers and external industrial partners. The Engineer will translate partner company requirements into manufacturable processes, produce detailed specifications and documentation for device and process development, qualify new processes to strict industry standards, and perform root-cause failure analysis with corrective and preventive actions that ensure repeatable, high-reliability outcomes for external clients.

The following items reflect the core responsibilities of the role. The list is not exhaustive and will evolve as Blusson QMI’s industry-service business model matures. The Electron-Beam Lithography and Process Engineer:

• Monitors, optimizes, and maintains all JEOL JBX-8100FS-enabled processes to ensure they remain within specification, proactively engineering interventions, preventive maintenance schedules, and performance metrics that maximize tool uptime and deliver consistent results for paid client work.
• Acts as the single point of accountability for the JEOL JBX-8100FS across all operational, technical, and client-facing dimensions—including tool performance qualification, user (and client) training, scheduling, and direct liaison with industrial partners—to guarantee reliability, consistency, and on-time delivery of commercial device programs.
• Supports the full process specification and execution for innovative micro- and nano-structured devices using the JEOL JBX-8100FS and complementary techniques (photolithography, wet/dry etching, PVD/CVD, electroforming, soft lithography, and advanced metrology). Develops and qualifies production-worthy process flows that meet exacting device-performance and yield targets for academic and commercial partners. Advises on the design and feasibility of engineering design aspects of various research projects for a wide range of internal and external stakeholders.
• Simultaneously drives multiple high-value projects, developing proprietary micro/nano-technologies on the JEOL JBX-8100FS, then successfully transferring those technologies and processes to internal teams and external industrial clients under NDA and fee-for-service-driven contracts.
• Serves as the senior technical advisor to internal and external stakeholders (including C-level, VP, and principal engineers at partner companies) on the design, feasibility, cost, and timeline of micro/nano-engineering solutions, providing clear risk assessments and alternative process pathways that align with real-world device-development requirements.
• Designs, develops, and qualifies novel capabilities and process modules on the JEOL JBX-8100FS and related nanofabrication equipment delivering innovative technologies for a number of different projects; independently designs and executes complex experiments to solve high-impact engineering challenges in resolution, overlay, dose control, and process integration for a wide range of internal and external stakeholders.
• Is an integral part of the ANF team that supports cleanroom operations, and proactive adoption of new processes that expand Blusson QMI’s service portfolio and competitive advantage in the industry market.
• Provides expert support, time, and specialized knowledge to Blusson QMI labs and strategic projects as directed by the Facilities Director, while contributing to additional tasks that advance Blusson QMI’s mission of delivering world-class, nanofabrication services. Will also be responsible for planning, design, specification, construction, installation, and maintenance of other scientific research equipment within the ANF.

What Success Looks Like:

Success in this role will be measured by high JEOL JBX-8100FS utilization for both academic and commercial projects. On the academic front, success will be measured by effective training and mentoring of HQP (graduate students, postdoctoral fellows, and research associates) in advanced electron-beam lithography and process-integration techniques, as well as close collaboration with research groups within Blusson QMI to streamline and optimize nanofabrication processes that directly support high-impact academic research, grant deliverables, and knowledge dissemination. On the industry side, success will be measured through strong client satisfaction with repeat business, successful qualification and delivery of new industry-grade processes, and measurable contributions to Blusson QMI’s nanofabrication service revenue and reputation as a trusted industry partner.

Consequence of Error/Judgement

Errors in judgement, mishandling of tools and neglect in following standard procedures could lead to the reduction of service available to the Institute affiliated UBC research groups and external users, cause damage to expensive equipment and endanger the health and safety of the post holder, other lab users and those in the vicinity. The position is central to the operation and delivery of services in Blusson QMI’s electron-beam lithography facility. Poor performance or errors in judgement may impact timely provision of services required by research, in particular students, who are working to strict timelines, and other internal and external users, including from industry and government. Issues with data quality could impact those stakeholders as well as the reputation of the facility and the University. Errors in performing the responsibilities of this position could also lead to unsafe laboratory conditions, which may jeopardize the safety of facility users and the role holder. Poor decisions could cause financial loss to the Institute via failure to collect money owing for use of facilities and exposure to liability or damage to equipment or facilities.

Supervision Received

Works independently. Reports to the Facilities Director, who determines the broad direction and operational requirements of the role, and who may also offer training and guidance.

Supervision Given

Provides advice to faculty, staff, postdocs, graduate students and other facility users on the proper and safe use of the electron-beam lithography tool and the associated processes, and oversees their activities within the electron-beam lithography lab.

Minimum Qualifications

Undergraduate degree in Engineering or Applied Science. Minimum of five years of related experience, or the equivalent combination of education and experience.

• Willingness to respect diverse perspectives, including perspectives in conflict with one’s own
• Demonstrates a commitment to enhancing one’s own awareness, knowledge, and skills related to equity, diversity, and inclusion

Preferred Qualifications

Degree in Engineering, Applied Science, Physics, Chemistry, or a closely related discipline. A graduate degree is strongly preferred. The successful candidate will be a recognized expert in high-resolution electron-beam lithography with a proven track record of delivering functional, yield-critical devices in academic/industrial or commercial R&D environments. Essential qualifications:

• Direct, hands-on experience in micro- and nano-device development.
• Experience developing and qualifying micro/nano-fabrication processes, with a portfolio of successfully fabricated devices that have had significant academic or industrial impact.
• Extensive hands-on expertise operating and maintaining a >50kv+high throughput electron-beam lithography system, such as the JEOL JBX-8100FS or equivalent vector-scan tool, with documented experience in process optimization, dose control, overlay, and sub-10 nm patterning for real-world device programs.
• Proven working knowledge and ownership of a broad range of complementary micro/nano-fabrication techniques, including photolithography, resist processing, wet and dry etching, and also physical and chemical vapour deposition.
• Demonstrated proficiency in device and process characterization using scanning electron microscopy, scanning probe microscopy, contact profilometry, and other metrology tools, with the ability to perform root-cause failure analysis and implement corrective/preventive actions that ensure repeatable outcomes.
• Strong safety awareness and commitment to cleanroom best practices.
• Proven ability to creatively solve complex engineering problems under tight timelines and resource constraints typical of client-driven projects.
• Excellent fault-finding and diagnostic skills for lithography tools, vacuum systems, and supporting instrumentation.
• Expertise with BEAMER software, or equivalent.
• Demonstrated ability to work effectively in a team environment while taking full ownership of technical deliverables.
• Strong client-facing communication skills, with the ability to present complex technical concepts, risks, and solutions clearly to non-specialist industry stakeholders (C-level, VPs, and principal engineers) through proposals, reports, and review meetings.
• Demonstrated track record of contributing to facility or team revenue growth through process standardization, service expansion, or successful delivery of fee-for-service-based nanofabrication work.

Highly Desirable Qualifications:

• Direct experience with the JEOL JBX-8100FS (or equivalent 100 kV system) in a service or foundry-like setting, including tool qualification, preventive maintenance, and client-facing process delivery.
• Proven experience in a core facility, foundry, or service-oriented environment serving external industrial clients, including the ability to manage multiple concurrent paid projects under commercial constraints (deadlines, budgets, IP protection).
• Proficiency with Linux-based operating systems, scripting, and software-hardware interfacing for lithography tool control.
• Experience managing multi-stakeholder, NDA-protected projects with external industrial partners (C-level, VP, or principal-engineer engagement).
• Track record of published research or patents in micro- and nanofabrication.
• Knowledge of high-end lithography software suites and advanced process-integration strategies for quantum, photonics, or advanced semiconductor devices.
• Direct experience developing and delivering fee-for-service or contract-based nanofabrication projects for commercial partners, including RFQ response and client project management.
• Familiarity with industry-standard practices for NDAs, statements of work, intellectual-property handling, and commercial project governance.